reference: ISO/TC 202
title: Microbeam analysis
scope: Standardization in the field of microbeam analysis (measurement, parameters, methods and reference materials) which uses electrons as an incident beam and electrons or photons as the detection signal. The use of ions for sample preparation and analysis in an electron microscope is also included, with the exception of techniques which use mass-filtered ions as the detected species.</p>
  <p>Excluded: Surface analysis techniques which come under the remit of ISO/TC 201.</p> <p><i>Note: </i> </p><p>The purpose is to analyze the compositional and structural characteristics of solid materials. The volume of analysis will generally involve a depth up to 10 micrometers and a surface area less than 100 square micrometers.  </p>
committeeLiaisons: ISO/TC 201
committeeLiaisons: ISO/TC 229